- 產品品牌：
- MKS
- 產品型號：
- 901P-21
- 產品用途：
- 真空測量
MICROPIRANI™ / PIEZO LOADLOCK TRANSDUCER
Sensor Type 1 MicroPirani™ (MEMS Thermal Conductivity)
Sensor Type 2 Piezo differential (MEMS diaphragm)
MicroPirani Accuracy(1)
5 X 10-4 to 1 X 10-3 Torr ±10% of reading
1 X 10-3 to 100 Torr ±5% of reading
100 Torr to Atm ±25% of reading
Repeatability(1)
1 X 10-3 to 100 Torr ±2% of reading
Transducer Model：901P Loadlock
Flange：KF25
Interface：RS232 / Analog
